专利名称：Illumination optical system发明人：Takashi Omata申请号：US07/715743申请日：19910618公开号：US05091744A公开日：19920225
摘要：An illumination optical system including a plurality of separate laser sources ora plurality of separate secondary light sources defined by the laser beams emergingfrom the laser sources. On an area to be illuminated, the laser beams emerging from thelaser sources or emerging from the secondary light sources are superposed upon oneanother, whereby uniform exposure and an improved imaging performance are assured.
申请人：CANON KABUSHIKI KAISHA
代理机构：Fitzpatrick, Cella, Harper & Scinto
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